DICP OpenIR
Subject Area光学
Residual stress prediction and control of Ta2O5/SiO2 multilayer based on layer structure designing
Deng SW(邓淞文); Wang F(王锋); Liu SF(刘顺福); Li G(李刚); Sun L(孙龙); Jin YQ(金玉奇)
Source PublicationFrontiers of Optical Coatings
Conference NameFrontiers of Optical Coatings
Conference Date2012-10-15
2012-10-15
Conference Place杭州
Pages6
Publisher待补充
Publication Place待补充
Cooperation Status分会口头报告
Department704
Funding Organization中国光学学会
AbstractResidual stress prediction and control of Ta2O5 SiO2 multilayer based on layer structure designing
Document Type会议论文
Identifierhttp://cas-ir.dicp.ac.cn/handle/321008/117036
Collection中国科学院大连化学物理研究所
Corresponding AuthorDeng SW(邓淞文)
Recommended Citation
GB/T 7714
Deng SW,Wang F,Liu SF,et al. Residual stress prediction and control of Ta2O5/SiO2 multilayer based on layer structure designing[C]. 待补充:待补充,2012:6.
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