DICP OpenIR
Subject Area物理化学
A Compact Low Energy Electron Microscope for Surface Analysis
Zhang, Guan-hua1; Sun, Ju-long1; Jin, Yan-ling1; Zang, Kan2; Guo, Fang-zhun2; Yang, Xue-ming1; Zhang GH(张冠华); Yang XM(杨学明)
KeywordLow Energy Electron Microscopy Flange-on Femtosecond Laser Lateral Resolution Small Deflection Angle
Source PublicationCHINESE JOURNAL OF CHEMICAL PHYSICS
2013-08-27
ISSN1674-0068
DOI10.1063/1674-0068/26/04/369-373
Volume26Issue:4Pages:369-373
Indexed BySCI
SubtypeArticle
Department11
Funding Project1102
Contribution Rank1,1
WOS HeadingsScience & Technology ; Physical Sciences
WOS SubjectPhysics, Atomic, Molecular & Chemical
WOS Research AreaPhysics
WOS KeywordMULTIPHOTON PHOTOEMISSION ; INTERFACE ; SI(111)
AbstractThe description and function characterization of a flange-on type low energy electron microscope are given. In this microscope a magnetic beam separator with 10 degrees deflection angle is used in order to facilitate compacting the instrument on a single 10 in. flange. Meanwhile some correcting elements in the electron optical system are simplified to reduce the complexities of construction and operation. The sample is set close to ground potential, so that all the electrostatic lenses are easily to float at high voltages. The performance of the microscope in typical low energy electron microscopy, low energy electron diffraction and photoemission electron microscopy modes is demonstrated through several experiments. A lateral resolution of 51 nm is estimated for low energy electron microscopy imaging. With femtosecond laser as light source, the consequent nonlinear photoemission makes this microscope also suitable for the observation of optical near field phenomena and a lateral resolution of 110 nm is obtained.
Language英语
WOS IDWOS:000324665200001
Citation statistics
Document Type期刊论文
Identifierhttp://cas-ir.dicp.ac.cn/handle/321008/117535
Collection中国科学院大连化学物理研究所
Corresponding AuthorZhang GH(张冠华); Yang XM(杨学明)
Affiliation1.Chinese Acad Sci, Dalian Inst Chem Phys, Dalian 116023, Peoples R China
2.Dalian Jiaotong Univ, Dalian 116028, Peoples R China
Recommended Citation
GB/T 7714
Zhang, Guan-hua,Sun, Ju-long,Jin, Yan-ling,et al. A Compact Low Energy Electron Microscope for Surface Analysis[J]. CHINESE JOURNAL OF CHEMICAL PHYSICS,2013,26(4):369-373.
APA Zhang, Guan-hua.,Sun, Ju-long.,Jin, Yan-ling.,Zang, Kan.,Guo, Fang-zhun.,...&杨学明.(2013).A Compact Low Energy Electron Microscope for Surface Analysis.CHINESE JOURNAL OF CHEMICAL PHYSICS,26(4),369-373.
MLA Zhang, Guan-hua,et al."A Compact Low Energy Electron Microscope for Surface Analysis".CHINESE JOURNAL OF CHEMICAL PHYSICS 26.4(2013):369-373.
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