DICP OpenIR
Subject Area张晨
一种同时含有方形、弧形通道PDMS芯片的制备方法; 一种同时含有方形、弧形通道PDMS芯片的制备方法; 一种同时含有方形、弧形通道PDMS芯片的制备方法; 一种同时含有方形、弧形通道PDMS芯片的制备方法
秦建华; 马静云; 姜雷; 张旭
Application NumberCN
Patent NumberCN201210438752.7
Patent Agent中国科学院大连化学物理研究所
Rights Holder中国科学院大连化学物理研究所
Certificate NumberCN201210438752.7
PCT Attributes实审
Country待填写
Department带填写
Funding Project大连化物所
一种同时含有方形、弧形通道PDMS芯片的制备方法; 一种同时含有方形、弧形通道PDMS芯片的制备方法; 一种同时含有方形、弧形通道PDMS芯片的制备方法; 一种同时含有方形、弧形通道PDMS芯片的制备方法
Date Available2012-11-06
Status发明
Funding Organization一种同时含有方形、弧形通道PDMS芯片的制备方法,步骤包括:通过标准光刻法制备的交联态SU-8阳模与液态PDMS夹合,PDMS固化后,得到反转有阳模图案的阴模PDMS;将阴模PDMS与固态未交联SU-8光刻胶夹合,真空烘箱加热使光刻胶呈流动态充满PDMS通道,得到未交联态的SU-8阳模;对该未交联SU-8阳模选择性曝光,使其局部交联得到方形突起部分;将该阳模加热一定时间,未交联突起部分呈弧形;经全曝光交联反应、后烘、坚模得到定型的SU-8方形、弧形阳模;浇筑以PDMS、固化、脱模得到含有方形、弧形通道的PDMS芯片。本发明制作的芯片应用于集成气动微阀的微流控芯片液路层制备;本发明制备的SU-8阳模不易从基片上脱落,PDMS芯片弧形通道弧度可控,为复杂芯片制备提供了一种简单稳定的制备方法。
Abstract带填写
Language2013-3-20
Document Type专利
Identifierhttp://cas-ir.dicp.ac.cn/handle/321008/118884
Collection中国科学院大连化学物理研究所
Recommended Citation
GB/T 7714
秦建华,马静云,姜雷,等. 一种同时含有方形、弧形通道PDMS芯片的制备方法, 一种同时含有方形、弧形通道PDMS芯片的制备方法, 一种同时含有方形、弧形通道PDMS芯片的制备方法, 一种同时含有方形、弧形通道PDMS芯片的制备方法. CN201210438752.7.
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