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题名: Fabrication of miniature silicon wafer fuel cells with improved performance
作者: Yu, JR;  Cheng, P;  Ma, ZQ;  Yi, BL
关键词: proton exchange membrane fuel cell ;  miniature fuel cell ;  micro-fabrication ;  silicon wafer ;  Cu/Au current collector
刊名: JOURNAL OF POWER SOURCES
发表日期: 2003-10-01
DOI: 10.1016/S0378-7753(03)00618-9
卷: 124, 期:1, 页:40-46
收录类别: SCI
文章类型: Article
WOS标题词: Science & Technology ;  Physical Sciences ;  Technology
类目[WOS]: Electrochemistry ;  Energy & Fuels
研究领域[WOS]: Electrochemistry ;  Energy & Fuels
英文摘要: The fabrication and performance evaluation of miniature fuel cells on silicon wafers are presented in this paper. The miniature fuel cells consisted of a membrane-electrode-assembly (MEA) between two silicon substrates. The feed holes and channels in the silicon wafers, acting as a fuel distributor, were prepared by anisotropic silicon etching from the back and front of the wafer using silicon dioxide as an etching mask. In an attempt to reduce the cell resistance and consequently improving cell performance of the miniature silicon wafer fuel cell, a Cu/Au composite layer was sputtered on the top of silicon wafers as a current collector. Testing results show that (i) the cell performance was improved by increasing the thickness of the composite layer on the silicon wafer, and (ii) the miniature silicon wafer fuel cell with smaller size channels gave a better performance at the diffusion-limiting current region. (C) 2003 Elsevier Science B.V. All rights reserved.
关键词[WOS]: DESIGN
语种: 英语
WOS记录号: WOS:000185563800006
Citation statistics: 
内容类型: 期刊论文
URI标识: http://cas-ir.dicp.ac.cn/handle/321008/138252
Appears in Collections:中国科学院大连化学物理研究所_期刊论文

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作者单位: 1.Hong Kong Univ Sci & Technol, Dept Mech Engn, Kowloon, Hong Kong, Peoples R China
2.Chinese Acad Sci, Dalian Inst Chem Phys, Fuel Cell R&D Ctr, Dalian 116023, Peoples R China

Recommended Citation:
Yu, JR,Cheng, P,Ma, ZQ,et al. Fabrication of miniature silicon wafer fuel cells with improved performance[J]. JOURNAL OF POWER SOURCES,2003,124(1):40-46.
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