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Ab initio/Rice-Ramsperger-Kassel-Marcus approach to carbon nitride formation: CH3NH2 decomposition
Zhang, RQ; Han, KL; Zhu, RS; Lee, CS; Lee, ST
刊名CHEMICAL PHYSICS LETTERS
2000-04-21
321期:1-2页:101-105
收录类别SCI
文章类型Article
WOS标题词Science & Technology ; Physical Sciences
类目[WOS]Chemistry, Physical ; Physics, Atomic, Molecular & Chemical
研究领域[WOS]Chemistry ; Physics
关键词[WOS]SOLIDS ; DIAMOND ; STABILITY ; C3N4
英文摘要An approach of combination of ab initio calculation with Rice-Ramsperger-Kassel-Marcus theory has been applied to the study of carbon nitride formation. The energetic characteristics and decomposition of one important intermediate CH3NH2 used in chemical vapor deposition (CVD) of carbon nitride thin film have been studied over a wide range of pressure and temperature. The calculated rate constants for three possible decomposition channels of the CH3NH2 depends strongly on the reaction temperature and pressure. The high rate constants for the CH3NH2 decomposition at high temperature might be responsible for the HCN or CNH formation in CVD of carbon nitride thin film. (C) 2000 Elsevier Science B.V. All rights reserved.
语种英语
WOS记录号WOS:000086634300017
引用统计
被引频次:8[WOS]   [WOS记录]     [WOS相关记录]
文献类型期刊论文
条目标识符http://cas-ir.dicp.ac.cn/handle/321008/138673
专题中国科学院大连化学物理研究所
作者单位1.City Univ Hong Kong, Ctr Super Diamond & Adv Films, Hong Kong, Hong Kong, Peoples R China
2.City Univ Hong Kong, Dept Phys & Mat Sci, Hong Kong, Hong Kong, Peoples R China
3.Chinese Acad Sci, Dalian Inst Chem Phys, State Key Lab Mol React Dynam, Dalian 116023, Peoples R China
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GB/T 7714
Zhang, RQ,Han, KL,Zhu, RS,et al. Ab initio/Rice-Ramsperger-Kassel-Marcus approach to carbon nitride formation: CH3NH2 decomposition[J]. CHEMICAL PHYSICS LETTERS,2000,321(1-2):101-105.
APA Zhang, RQ,Han, KL,Zhu, RS,Lee, CS,&Lee, ST.(2000).Ab initio/Rice-Ramsperger-Kassel-Marcus approach to carbon nitride formation: CH3NH2 decomposition.CHEMICAL PHYSICS LETTERS,321(1-2),101-105.
MLA Zhang, RQ,et al."Ab initio/Rice-Ramsperger-Kassel-Marcus approach to carbon nitride formation: CH3NH2 decomposition".CHEMICAL PHYSICS LETTERS 321.1-2(2000):101-105.
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