中国科学院大连化学物理研究所机构知识库
Advanced  
DICP OpenIR  > 中国科学院大连化学物理研究所  > 期刊论文
题名: Deposition of high quality TiN thin films with nano-structure
作者: Yan, PX;  Wu, ZG;  Xu, JW;  Zhang, YJ;  Zhang, WW;  Liu, WM
关键词: TiN ;  filtered cathode arc plasma ;  nano-thin films
刊名: JOURNAL OF INORGANIC MATERIALS
发表日期: 2004-11-01
卷: 19, 期:6, 页:1386-1390
收录类别: SCI
文章类型: Article
WOS标题词: Science & Technology ;  Technology
类目[WOS]: Materials Science, Ceramics
研究领域[WOS]: Materials Science
英文摘要: Nano-structure TiN thin films with excellent properties were deposited on the silicon wafer and stainless steel substrate under room temperature by a filtered cathode arc plasma technique. The structure and morphology of the films were characterized by atomic force microscopy (AFM) and small angle X-ray diffractometer (XRD), and it's hardness and elastic mouldness were measured by nano-indenter. Research results show that the TiN thin. films are highly uniform, very smooth, dense and droplet-phase-free. The average grain size of the films is 50nm, and it's hardness is up to 50GPa that is about two times of that deposited by conventional CVD and PVD techniques. XRD analysis demonstrates that the diffraction peaks of the TiN films move to small angle, and the films display a preferred orientation along plane (111).
关键词[WOS]: PLASMA
语种: 英语
WOS记录号: WOS:000225444000026
Citation statistics: 
内容类型: 期刊论文
URI标识: http://cas-ir.dicp.ac.cn/handle/321008/139477
Appears in Collections:中国科学院大连化学物理研究所_期刊论文

Files in This Item:

There are no files associated with this item.


作者单位: 1.Lanzhou Univ, Inst Plasma & Met Mat, Lanzhou 730000, Peoples R China
2.Chinese Acad Sci, Inst Chem Phys, State Key Lab Solid Lubr, Lanzhou 730000, Peoples R China

Recommended Citation:
Yan, PX,Wu, ZG,Xu, JW,et al. Deposition of high quality TiN thin films with nano-structure[J]. JOURNAL OF INORGANIC MATERIALS,2004,19(6):1386-1390.
Service
 Recommend this item
 Sava as my favorate item
 Show this item's statistics
 Export Endnote File
Google Scholar
 Similar articles in Google Scholar
 [Yan, PX]'s Articles
 [Wu, ZG]'s Articles
 [Xu, JW]'s Articles
CSDL cross search
 Similar articles in CSDL Cross Search
 [Yan, PX]‘s Articles
 [Wu, ZG]‘s Articles
 [Xu, JW]‘s Articles
Related Copyright Policies
Null
Social Bookmarking
  Add to CiteULike  Add to Connotea  Add to Del.icio.us  Add to Digg  Add to Reddit 
所有评论 (0)
暂无评论
 
评注功能仅针对注册用户开放,请您登录
您对该条目有什么异议,请填写以下表单,管理员会尽快联系您。
内 容:
Email:  *
单位:
验证码:   刷新
您在IR的使用过程中有什么好的想法或者建议可以反馈给我们。
标 题:
 *
内 容:
Email:  *
验证码:   刷新

Items in IR are protected by copyright, with all rights reserved, unless otherwise indicated.

 

 

Valid XHTML 1.0!
Powered by CSpace