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题名: Measurement of atomic hydrogen density in non-thermal H-2 plasmas via threshold ionisation-molecular beam mass spectrometry
作者: Wang, W. G.1, 3;  Xu, Y.1, 2;  Dong, C.3;  Zhang, N. Z.3;  Hou, K. Y.3;  Li, H. Y.3
刊名: EUROPEAN PHYSICAL JOURNAL D
发表日期: 2008-12-01
DOI: 10.1140/epjd/e2008-00232-x
卷: 50, 期:3, 页:257-264
收录类别: SCI
文章类型: Article
WOS标题词: Science & Technology ;  Physical Sciences
类目[WOS]: Optics ;  Physics, Atomic, Molecular & Chemical
研究领域[WOS]: Optics ;  Physics
英文摘要: Determinations of radical density are essential to investigate the physical-chemical processes in plasmas and setup the related theoretical models. This paper presents the experimental measurement of atomic hydrogen near grounded electrode in dielectric barrier discharge medium-pressure hydrogen plasma via threshold ionisation-molecular beam mass spectrometry. After investigating the possible influences from parent molecules in excited states, background component and space-charge, evolution of atomic hydrogen density as functions of discharge parameters are investigated utilising the signal of H-2 molecule beam as the reference. At fixed gas pressure of 6.0 torr and a discharge voltage of 24 kV, atomic hydrogen density increases monotonously from 1.1 x 10(14) to 2.0 x 10(15) cm(-3) as the discharge frequency increases from 9 to 26 kHz. Similarly the rising discharge voltage also lead to enhancement of atomic hydrogen density.
关键词[WOS]: ELECTRON-IMPACT ;  IN-SITU ;  DISCHARGE ;  RADICALS ;  GROWTH ;  DIAMOND ;  FILMS
语种: 英语
WOS记录号: WOS:000262653400005
Citation statistics: 
内容类型: 期刊论文
URI标识: http://cas-ir.dicp.ac.cn/handle/321008/140936
Appears in Collections:中国科学院大连化学物理研究所_期刊论文

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作者单位: 1.Dalian Univ Technol, Lab Plasma Phys Chem, Dalian, Peoples R China
2.Dalian Univ Technol, State Key Lab Mat Modicat Ion Elect & Laser Beams, Dalian, Peoples R China
3.Chinese Acad Sci, Dalian Inst Chem Phys, Dalian 116023, Peoples R China

Recommended Citation:
Wang, W. G.,Xu, Y.,Dong, C.,et al. Measurement of atomic hydrogen density in non-thermal H-2 plasmas via threshold ionisation-molecular beam mass spectrometry[J]. EUROPEAN PHYSICAL JOURNAL D,2008,50(3):257-264.
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