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Measurement of atomic hydrogen density in non-thermal H-2 plasmas via threshold ionisation-molecular beam mass spectrometry
Wang, W. G.1,3; Xu, Y.1,2; Dong, C.3; Zhang, N. Z.3; Hou, K. Y.3; Li, H. Y.3
刊名EUROPEAN PHYSICAL JOURNAL D
2008-12-01
DOI10.1140/epjd/e2008-00232-x
50期:3页:257-264
收录类别SCI
文章类型Article
WOS标题词Science & Technology ; Physical Sciences
类目[WOS]Optics ; Physics, Atomic, Molecular & Chemical
研究领域[WOS]Optics ; Physics
关键词[WOS]ELECTRON-IMPACT ; IN-SITU ; DISCHARGE ; RADICALS ; GROWTH ; DIAMOND ; FILMS
英文摘要Determinations of radical density are essential to investigate the physical-chemical processes in plasmas and setup the related theoretical models. This paper presents the experimental measurement of atomic hydrogen near grounded electrode in dielectric barrier discharge medium-pressure hydrogen plasma via threshold ionisation-molecular beam mass spectrometry. After investigating the possible influences from parent molecules in excited states, background component and space-charge, evolution of atomic hydrogen density as functions of discharge parameters are investigated utilising the signal of H-2 molecule beam as the reference. At fixed gas pressure of 6.0 torr and a discharge voltage of 24 kV, atomic hydrogen density increases monotonously from 1.1 x 10(14) to 2.0 x 10(15) cm(-3) as the discharge frequency increases from 9 to 26 kHz. Similarly the rising discharge voltage also lead to enhancement of atomic hydrogen density.
语种英语
WOS记录号WOS:000262653400005
引用统计
被引频次:1[WOS]   [WOS记录]     [WOS相关记录]
文献类型期刊论文
条目标识符http://cas-ir.dicp.ac.cn/handle/321008/140936
专题中国科学院大连化学物理研究所
作者单位1.Dalian Univ Technol, Lab Plasma Phys Chem, Dalian, Peoples R China
2.Dalian Univ Technol, State Key Lab Mat Modicat Ion Elect & Laser Beams, Dalian, Peoples R China
3.Chinese Acad Sci, Dalian Inst Chem Phys, Dalian 116023, Peoples R China
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Wang, W. G.,Xu, Y.,Dong, C.,et al. Measurement of atomic hydrogen density in non-thermal H-2 plasmas via threshold ionisation-molecular beam mass spectrometry[J]. EUROPEAN PHYSICAL JOURNAL D,2008,50(3):257-264.
APA Wang, W. G.,Xu, Y.,Dong, C.,Zhang, N. Z.,Hou, K. Y.,&Li, H. Y..(2008).Measurement of atomic hydrogen density in non-thermal H-2 plasmas via threshold ionisation-molecular beam mass spectrometry.EUROPEAN PHYSICAL JOURNAL D,50(3),257-264.
MLA Wang, W. G.,et al."Measurement of atomic hydrogen density in non-thermal H-2 plasmas via threshold ionisation-molecular beam mass spectrometry".EUROPEAN PHYSICAL JOURNAL D 50.3(2008):257-264.
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