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题名: Research of Plasma Characteristics of the Radio-Frequency Discharge in O-2 and Its Mixtures
作者: Zhang Xue-Ling1;  Wang Xin-Bing1;  Li Guo-Fu2
刊名: CHINESE PHYSICS LETTERS
发表日期: 2009-02-01
卷: 26, 期:2
收录类别: SCI
文章类型: Article
WOS标题词: Science & Technology ;  Physical Sciences
类目[WOS]: Physics, Multidisciplinary
研究领域[WOS]: Physics
英文摘要: Electron mean energy and the effects of gas mixture are studied theoretically and experimentally. The electron mean energy in O-2 and its mixtures is obtained by solving Boltzmann's equation. The experiments of the Langmuir probe system and spectral analysis are carried out. It is shown that electron temperature goes down with the increasing pressure, narrowing pulse width and the addition of helium and argon. According to the intensity of oxygen atom at 777.19 nm, xenon is more effective in inhibition of O-2 decomposition than helium and argon.
关键词[WOS]: TRANSPORT-COEFFICIENTS ;  ELECTRIC-DISCHARGE ;  OXYGEN ;  LASER
语种: 英语
WOS记录号: WOS:000263243800034
Citation statistics: 
内容类型: 期刊论文
URI标识: http://cas-ir.dicp.ac.cn/handle/321008/141261
Appears in Collections:中国科学院大连化学物理研究所_期刊论文

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作者单位: 1.Huazhong Univ Sci & Technol, Inst Optoelectron Sci & Engn, Wuhan Natl Lab Optoelectron, Wuhan 430074, Peoples R China
2.Dalian Inst Chem Phys, Chinese Acad Sci, Dalian 116023, Peoples R China

Recommended Citation:
Zhang Xue-Ling,Wang Xin-Bing,Li Guo-Fu. Research of Plasma Characteristics of the Radio-Frequency Discharge in O-2 and Its Mixtures[J]. CHINESE PHYSICS LETTERS,2009,26(2).
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