DICP OpenIR
Subject Area物理化学
低温等离子体辅助脉冲直流磁控溅射制备TiN薄膜
吕起鹏; 李刚; 公发全; 王锋; 卢俊; 孙龙; 金玉奇
Source Publication真空科学与技术学报
2014-12-24
Volume34Issue:11Pages:1192
Document Type期刊论文
Identifierhttp://cas-ir.dicp.ac.cn/handle/321008/143997
Collection中国科学院大连化学物理研究所
Corresponding Author李刚
Affiliation大连化学物理研究所
Recommended Citation
GB/T 7714
吕起鹏,李刚,公发全,等. 低温等离子体辅助脉冲直流磁控溅射制备TiN薄膜[J]. 真空科学与技术学报,2014,34(11):1192.
APA 吕起鹏.,李刚.,公发全.,王锋.,卢俊.,...&金玉奇.(2014).低温等离子体辅助脉冲直流磁控溅射制备TiN薄膜.真空科学与技术学报,34(11),1192.
MLA 吕起鹏,et al."低温等离子体辅助脉冲直流磁控溅射制备TiN薄膜".真空科学与技术学报 34.11(2014):1192.
Files in This Item:
File Name/Size DocType Version Access License
2014WeBnlvFaRf.PDF(377KB)期刊论文作者接受稿开放获取CC BY-NC-SAApplication Full Text
Related Services
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[吕起鹏]'s Articles
[李刚]'s Articles
[公发全]'s Articles
Baidu academic
Similar articles in Baidu academic
[吕起鹏]'s Articles
[李刚]'s Articles
[公发全]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[吕起鹏]'s Articles
[李刚]'s Articles
[公发全]'s Articles
Terms of Use
No data!
Social Bookmark/Share
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.