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Characteristic Study of an Atmospheric-Pressure Radio-Frequency Capacitive Argon/Nitrogen Plasma Discharge
Huai, Ying1; Li, Shou-Zhe2,3; Li, Hong2,3; Wu, Kenan1; Zhang, Jialiang2,3; Wang, Shangmin2,3; Wang, Yong-Xing4
关键词Atmospheric Pressure Optical Emission Spectroscopy (Oes) Plasma Discharge Radio Frequency (Rf)
刊名IEEE TRANSACTIONS ON PLASMA SCIENCE
2014-06-01
DOI10.1109/TPS.2014.2320263
42期:6页:1648-1653
收录类别SCI
文章类型Article
WOS标题词Science & Technology ; Physical Sciences
类目[WOS]Physics, Fluids & Plasmas
研究领域[WOS]Physics
关键词[WOS]NITROGEN PLASMA ; GLOW-DISCHARGES ; ARGON
英文摘要A developed atmospheric-pressure capacitive discharge source driven by radio-frequency power supply at 13.56 MHz is capable of producing a homogeneous and cold glow discharge in N-2/Ar. The measurements of its electrical parameters are made systematically with respect to the nitrogen component when diluted into argon plasma discharge at various concentration ratio, and the variation tendencies of the atomic nitrogen and the N-2(C-3 Pi u) states with the concentration ratio of nitrogen to argon are investigated by means of optical emission spectroscopy. It is shown that although the admixture of nitrogen into argon plasma changes the electric characteristics greatly, the vibrational distribution function alters slightly at the same mixture ratio, and the production of N-atom is proportional to the nitrogen component.
语种英语
WOS记录号WOS:000338118000016
引用统计
文献类型期刊论文
条目标识符http://cas-ir.dicp.ac.cn/handle/321008/145569
专题中国科学院大连化学物理研究所
作者单位1.Chinese Acad Sci, Dalian Inst Chem Phys, Lab Chem Lasers, Dalian 116023, Peoples R China
2.Dalian Univ Technol, Minist Educ, Key Lab Mat Modificat Laser Ion Electron Beams, Dalian 116023, Peoples R China
3.Dalian Univ Technol, Sch Phys & Optoelect Technol, Dalian 116023, Peoples R China
4.Dalian Univ Technol, Coll Elect Engn, Dalian 116023, Peoples R China
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GB/T 7714
Huai, Ying,Li, Shou-Zhe,Li, Hong,et al. Characteristic Study of an Atmospheric-Pressure Radio-Frequency Capacitive Argon/Nitrogen Plasma Discharge[J]. IEEE TRANSACTIONS ON PLASMA SCIENCE,2014,42(6):1648-1653.
APA Huai, Ying.,Li, Shou-Zhe.,Li, Hong.,Wu, Kenan.,Zhang, Jialiang.,...&Wang, Yong-Xing.(2014).Characteristic Study of an Atmospheric-Pressure Radio-Frequency Capacitive Argon/Nitrogen Plasma Discharge.IEEE TRANSACTIONS ON PLASMA SCIENCE,42(6),1648-1653.
MLA Huai, Ying,et al."Characteristic Study of an Atmospheric-Pressure Radio-Frequency Capacitive Argon/Nitrogen Plasma Discharge".IEEE TRANSACTIONS ON PLASMA SCIENCE 42.6(2014):1648-1653.
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