DICP OpenIR
Characteristic Study of an Atmospheric-Pressure Radio-Frequency Capacitive Argon/Nitrogen Plasma Discharge
Huai, Ying1; Li, Shou-Zhe2,3; Li, Hong2,3; Wu, Kenan1; Zhang, Jialiang2,3; Wang, Shangmin2,3; Wang, Yong-Xing4
KeywordAtmospheric Pressure Optical Emission Spectroscopy (Oes) Plasma Discharge Radio Frequency (Rf)
Source PublicationIEEE TRANSACTIONS ON PLASMA SCIENCE
2014-06-01
DOI10.1109/TPS.2014.2320263
Volume42Issue:6Pages:1648-1653
Indexed BySCI
SubtypeArticle
WOS HeadingsScience & Technology ; Physical Sciences
WOS SubjectPhysics, Fluids & Plasmas
WOS Research AreaPhysics
WOS KeywordNITROGEN PLASMA ; GLOW-DISCHARGES ; ARGON
AbstractA developed atmospheric-pressure capacitive discharge source driven by radio-frequency power supply at 13.56 MHz is capable of producing a homogeneous and cold glow discharge in N-2/Ar. The measurements of its electrical parameters are made systematically with respect to the nitrogen component when diluted into argon plasma discharge at various concentration ratio, and the variation tendencies of the atomic nitrogen and the N-2(C-3 Pi u) states with the concentration ratio of nitrogen to argon are investigated by means of optical emission spectroscopy. It is shown that although the admixture of nitrogen into argon plasma changes the electric characteristics greatly, the vibrational distribution function alters slightly at the same mixture ratio, and the production of N-atom is proportional to the nitrogen component.
Language英语
WOS IDWOS:000338118000016
Citation statistics
Cited Times:8[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://cas-ir.dicp.ac.cn/handle/321008/145569
Collection中国科学院大连化学物理研究所
Affiliation1.Chinese Acad Sci, Dalian Inst Chem Phys, Lab Chem Lasers, Dalian 116023, Peoples R China
2.Dalian Univ Technol, Minist Educ, Key Lab Mat Modificat Laser Ion Electron Beams, Dalian 116023, Peoples R China
3.Dalian Univ Technol, Sch Phys & Optoelect Technol, Dalian 116023, Peoples R China
4.Dalian Univ Technol, Coll Elect Engn, Dalian 116023, Peoples R China
Recommended Citation
GB/T 7714
Huai, Ying,Li, Shou-Zhe,Li, Hong,et al. Characteristic Study of an Atmospheric-Pressure Radio-Frequency Capacitive Argon/Nitrogen Plasma Discharge[J]. IEEE TRANSACTIONS ON PLASMA SCIENCE,2014,42(6):1648-1653.
APA Huai, Ying.,Li, Shou-Zhe.,Li, Hong.,Wu, Kenan.,Zhang, Jialiang.,...&Wang, Yong-Xing.(2014).Characteristic Study of an Atmospheric-Pressure Radio-Frequency Capacitive Argon/Nitrogen Plasma Discharge.IEEE TRANSACTIONS ON PLASMA SCIENCE,42(6),1648-1653.
MLA Huai, Ying,et al."Characteristic Study of an Atmospheric-Pressure Radio-Frequency Capacitive Argon/Nitrogen Plasma Discharge".IEEE TRANSACTIONS ON PLASMA SCIENCE 42.6(2014):1648-1653.
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