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题名: Characteristic Study of an Atmospheric-Pressure Radio-Frequency Capacitive Argon/Nitrogen Plasma Discharge
作者: Huai, Ying1;  Li, Shou-Zhe2, 3;  Li, Hong2, 3;  Wu, Kenan1;  Zhang, Jialiang2, 3;  Wang, Shangmin2, 3;  Wang, Yong-Xing4
关键词: Atmospheric pressure ;  optical emission spectroscopy (OES) ;  plasma discharge ;  radio frequency (RF)
刊名: IEEE TRANSACTIONS ON PLASMA SCIENCE
发表日期: 2014-06-01
DOI: 10.1109/TPS.2014.2320263
卷: 42, 期:6, 页:1648-1653
收录类别: SCI
文章类型: Article
WOS标题词: Science & Technology ;  Physical Sciences
类目[WOS]: Physics, Fluids & Plasmas
研究领域[WOS]: Physics
英文摘要: A developed atmospheric-pressure capacitive discharge source driven by radio-frequency power supply at 13.56 MHz is capable of producing a homogeneous and cold glow discharge in N-2/Ar. The measurements of its electrical parameters are made systematically with respect to the nitrogen component when diluted into argon plasma discharge at various concentration ratio, and the variation tendencies of the atomic nitrogen and the N-2(C-3 Pi u) states with the concentration ratio of nitrogen to argon are investigated by means of optical emission spectroscopy. It is shown that although the admixture of nitrogen into argon plasma changes the electric characteristics greatly, the vibrational distribution function alters slightly at the same mixture ratio, and the production of N-atom is proportional to the nitrogen component.
关键词[WOS]: NITROGEN PLASMA ;  GLOW-DISCHARGES ;  ARGON
语种: 英语
WOS记录号: WOS:000338118000016
Citation statistics: 
内容类型: 期刊论文
URI标识: http://cas-ir.dicp.ac.cn/handle/321008/145569
Appears in Collections:中国科学院大连化学物理研究所_期刊论文

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作者单位: 1.Chinese Acad Sci, Dalian Inst Chem Phys, Lab Chem Lasers, Dalian 116023, Peoples R China
2.Dalian Univ Technol, Minist Educ, Key Lab Mat Modificat Laser Ion Electron Beams, Dalian 116023, Peoples R China
3.Dalian Univ Technol, Sch Phys & Optoelect Technol, Dalian 116023, Peoples R China
4.Dalian Univ Technol, Coll Elect Engn, Dalian 116023, Peoples R China

Recommended Citation:
Huai, Ying,Li, Shou-Zhe,Li, Hong,et al. Characteristic Study of an Atmospheric-Pressure Radio-Frequency Capacitive Argon/Nitrogen Plasma Discharge[J]. IEEE TRANSACTIONS ON PLASMA SCIENCE,2014,42(6):1648-1653.
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