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题名: On the Characteristics of Coaxial-Type Microwave Excited Linear Plasma: a Simple Numerical Analysis
作者: Chen Longwei1;  Meng Yuedong1;  Zuo Xiao1;  Ren Zhaoxing1;  Wu Kenan2;  Wang Shuai3
关键词: numerical analysis ;  mechanism ;  microwave plasma ;  line-shape plasma
刊名: PLASMA SCIENCE & TECHNOLOGY
发表日期: 2015-05-01
DOI: 10.1088/1009-0630/17/5/04
卷: 17, 期:5, 页:372-383
收录类别: SCI
文章类型: Article
WOS标题词: Science & Technology ;  Physical Sciences
类目[WOS]: Physics, Fluids & Plasmas
研究领域[WOS]: Physics
英文摘要: To unveil the characteristics and available propagation mechanism of coaxial-type microwave excited line-shape plasma, the effects of parameters including microwave power, working pressure, dielectric constant, and external magnetic field on the plasma distribution were numerically investigated by solving a coupled system of Maxwell's equations and continuity equations. Numerical results indicate that high microwave power, relatively high working pressure, low dielectric constant, and shaped magnetic field profiles will help produce a high-density and uniform plasma source. Exciting both ends by microwave contributed to the high-density and uniform plasma source as well. Possible mechanisms were analyzed by using the polarization model of low temperature plasma. The generation and propagation processes of the line-shape plasma mainly depend on the interaction of three aspects, i.e. the transmitted part, penetration part and absorptive part of the electromagnetic field. The numerical results were qualitatively consistent with available experimental results from literature. More elaborate descriptions of the three aspects and corresponding interactions among them need to be investigated further to improve the properties of the line-shape plasma.
关键词[WOS]: INDUCTIVELY-COUPLED PLASMA ;  HIGH-DENSITY ;  DEPOSITION ;  SILICON ;  PECVD ;  DISCHARGES ;  FREQUENCY
语种: 英语
WOS记录号: WOS:000354063800004
Citation statistics: 
内容类型: 期刊论文
URI标识: http://cas-ir.dicp.ac.cn/handle/321008/146221
Appears in Collections:中国科学院大连化学物理研究所_期刊论文

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作者单位: 1.Chinese Acad Sci, Inst Plasma Phys, Hefei 230031, Peoples R China
2.Chinese Acad Sci, Dalian Inst Chem Phys, Dalian 116023, Peoples R China
3.Northeastern Univ, Coll Sci, Dept Phys, Shenyang 110891, Peoples R China

Recommended Citation:
Chen Longwei,Meng Yuedong,Zuo Xiao,et al. On the Characteristics of Coaxial-Type Microwave Excited Linear Plasma: a Simple Numerical Analysis[J]. PLASMA SCIENCE & TECHNOLOGY,2015,17(5):372-383.
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