DICP OpenIR
铝薄膜结构第一镜氢离子溅射特性研究
公发全; 李刚; 谭艳楠; 张敏; 周徐阳; 牟宗信; 刘万发; 董闯
Source Publication真空科学与技术学报
2015-12-16
Volume35Issue:0Pages:984
Contribution Rank1
Language中文
Document Type期刊论文
Identifierhttp://cas-ir.dicp.ac.cn/handle/321008/147964
Collection中国科学院大连化学物理研究所
Corresponding Author公发全
Affiliation大连化学物理研究所
Recommended Citation
GB/T 7714
公发全,李刚,谭艳楠,等. 铝薄膜结构第一镜氢离子溅射特性研究[J]. 真空科学与技术学报,2015,35(0):984.
APA 公发全.,李刚.,谭艳楠.,张敏.,周徐阳.,...&董闯.(2015).铝薄膜结构第一镜氢离子溅射特性研究.真空科学与技术学报,35(0),984.
MLA 公发全,et al."铝薄膜结构第一镜氢离子溅射特性研究".真空科学与技术学报 35.0(2015):984.
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