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Fabrication of broadband antireflection coatings using broadband optical monitoring mixed with time monitoring
Lv, Qi-Peng1,2; Deng, Song-Wen1; Zhang, Shao-Qian1; Gong, Fa-Quan1; Li, Gang1
关键词Broadband Optical Monitoring Time Monitoring Ultra-thin And Sensitive Layer Broadband Antireflection Coatings
刊名CHINESE PHYSICS B
2017-05-01
DOI10.1088/1674-1056/26/5/057801
26
收录类别SCI
文章类型Article
WOS标题词Science & Technology ; Physical Sciences
类目[WOS]Physics, Multidisciplinary
研究领域[WOS]Physics
关键词[WOS]WAVELENGTHS ; FILTERS
英文摘要Multi-layer optical coatings with complex spectrum requirements, such as multi-band pass filters, notch filters, and ultra-broadband antireflection coating, which usually contain very thin layers and sensitive layers, are difficult to be fabricated using a quartz crystal monitoring method or a single wavelength optical monitoring system (SWLOMS). In this paper, a broadband antireflection (AR) coating applied in the wavelength range from 800 nm to 1800 nm was designed and deposited by ion beam sputtering (IBS). Ta2O5 and SiO2 were chosen as high and low refractive index coating materials, respectively. The optimized coating structure contains 9 non-quarter-wave (QW) layers totally with ultra-thin layers and sensitive layers in this coating stack. In order to obtain high transmittance, it is very important to realize the thickness accurate control on these thin layers and sensitive layers. A broadband optical monitoring mixed with time monitoring strategy was successfully used to control the layer thickness during the deposition process. At last, the measured transmittance of AR coating is quite close to the theoretical value. A 0.6% variation in short wavelength edge across the central 180 mm diameter is demonstrated. A spectrum shift of less than 0.5% for 2 continuous runs is also presented.
语种英语
WOS记录号WOS:000402795500001
引用统计
文献类型期刊论文
条目标识符http://cas-ir.dicp.ac.cn/handle/321008/152215
专题中国科学院大连化学物理研究所
作者单位1.Chinese Acad Sci, Dalian Inst Chem Phys, Key Lab Chem Lasers, Dalian 116023, Peoples R China
2.Dalian Univ Technol, Sch Mat Sci & Engn, Dalian 116024, Peoples R China
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GB/T 7714
Lv, Qi-Peng,Deng, Song-Wen,Zhang, Shao-Qian,et al. Fabrication of broadband antireflection coatings using broadband optical monitoring mixed with time monitoring[J]. CHINESE PHYSICS B,2017,26.
APA Lv, Qi-Peng,Deng, Song-Wen,Zhang, Shao-Qian,Gong, Fa-Quan,&Li, Gang.(2017).Fabrication of broadband antireflection coatings using broadband optical monitoring mixed with time monitoring.CHINESE PHYSICS B,26.
MLA Lv, Qi-Peng,et al."Fabrication of broadband antireflection coatings using broadband optical monitoring mixed with time monitoring".CHINESE PHYSICS B 26(2017).
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