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题名: Fabrication of broadband antireflection coatings using broadband optical monitoring mixed with time monitoring
作者: Lv, Qi-Peng1, 2;  Deng, Song-Wen1;  Zhang, Shao-Qian1;  Gong, Fa-Quan1;  Li, Gang1
关键词: broadband optical monitoring ;  time monitoring ;  ultra-thin and sensitive layer ;  broadband antireflection coatings
刊名: CHINESE PHYSICS B
发表日期: 2017-05-01
DOI: 10.1088/1674-1056/26/5/057801
卷: 26
收录类别: SCI
文章类型: Article
WOS标题词: Science & Technology ;  Physical Sciences
类目[WOS]: Physics, Multidisciplinary
研究领域[WOS]: Physics
英文摘要: Multi-layer optical coatings with complex spectrum requirements, such as multi-band pass filters, notch filters, and ultra-broadband antireflection coating, which usually contain very thin layers and sensitive layers, are difficult to be fabricated using a quartz crystal monitoring method or a single wavelength optical monitoring system (SWLOMS). In this paper, a broadband antireflection (AR) coating applied in the wavelength range from 800 nm to 1800 nm was designed and deposited by ion beam sputtering (IBS). Ta2O5 and SiO2 were chosen as high and low refractive index coating materials, respectively. The optimized coating structure contains 9 non-quarter-wave (QW) layers totally with ultra-thin layers and sensitive layers in this coating stack. In order to obtain high transmittance, it is very important to realize the thickness accurate control on these thin layers and sensitive layers. A broadband optical monitoring mixed with time monitoring strategy was successfully used to control the layer thickness during the deposition process. At last, the measured transmittance of AR coating is quite close to the theoretical value. A 0.6% variation in short wavelength edge across the central 180 mm diameter is demonstrated. A spectrum shift of less than 0.5% for 2 continuous runs is also presented.
关键词[WOS]: WAVELENGTHS ;  FILTERS
语种: 英语
WOS记录号: WOS:000402795500001
Citation statistics: 
内容类型: 期刊论文
URI标识: http://cas-ir.dicp.ac.cn/handle/321008/152215
Appears in Collections:中国科学院大连化学物理研究所_期刊论文

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作者单位: 1.Chinese Acad Sci, Dalian Inst Chem Phys, Key Lab Chem Lasers, Dalian 116023, Peoples R China
2.Dalian Univ Technol, Sch Mat Sci & Engn, Dalian 116024, Peoples R China

Recommended Citation:
Lv, Qi-Peng,Deng, Song-Wen,Zhang, Shao-Qian,et al. Fabrication of broadband antireflection coatings using broadband optical monitoring mixed with time monitoring[J]. CHINESE PHYSICS B,2017,26.
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