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Fabrication of a miniature twin-fuel-cell on silicon wafer
Yu, JR; Cheng, P; Ma, ZQ; Yi, BL
关键词Miniature Fuel Cell Twin-fuel-cell Microfabrication Silicon Wafer Interconnect Resistance
刊名ELECTROCHIMICA ACTA
2003-05-15
DOI10.1016/S0013-4686(03)00034-3
48期:11页:1537-1541
收录类别SCI
文章类型Article
部门归属301
项目归属301
产权排名2;1
WOS标题词Science & Technology ; Physical Sciences
类目[WOS]Electrochemistry
研究领域[WOS]Electrochemistry
英文摘要The fabrication and performance evaluation of a miniature twin-fuel-cell on silicon wafers are presented in this paper. The miniature twin-fuel-cell was fabricated in series using two membrane-electrode-assemblies sandwiched between two silicon substrates in which electric current, reactant, and product flow. The novel structure of the miniature twin-fuel-cell is that the electricity interconnect from the cathode of one cell to the anode of another cell is made on the same plane. The interconnect was fabricated by sputtering a layer of copper over a layer of gold on the top of the silicon wafer. Silicon dioxide was deposited on the silicon wafer adjacent to the copper layer to prevent short-circuiting between the twin cells. The feed holes and channels in the silicon wafers were prepared by anisotropic silicon etching from the back and front of the wafer with silicon dioxide acting as intrinsic etch-stop layer. Operating on dry H-2/O-2 at 25 degreesC and atmospheric pressure, the measured peak power density was 190.4 mW/cm(2) at 270 mA/cm(2) for the miniature twin-fuel-cell using a Nafion 112 membrane. Based on the polarization curves of the twin-fuel-cell and the two single cells, the interconnect resistance between the twin cells was calculated to be in the range from 0.0113 Omega (at 10 mA/cm(2)) to 0.0150 Omega (at 300 mA/cm(2)), which is relatively low. (C) 2003 Elsevier Science Ltd. All rights reserved.
语种英语
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WOS记录号WOS:000182330700009
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被引频次:56[WOS]   [WOS记录]     [WOS相关记录]
文献类型期刊论文
条目标识符http://cas-ir.dicp.ac.cn/handle/321008/82771
专题中国科学院大连化学物理研究所
作者单位1.Hong Kong Univ Sci & Technol, Dept Mech Engn, Kowloon, Hong Kong, Peoples R China
2.Chinese Acad Sci, Dalian Inst Chem Phys, Fuel Cell R&D Ctr, Dalian 116023, Peoples R China
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GB/T 7714
Yu, JR,Cheng, P,Ma, ZQ,et al. Fabrication of a miniature twin-fuel-cell on silicon wafer[J]. ELECTROCHIMICA ACTA,2003,48(11):1537-1541.
APA Yu, JR,Cheng, P,Ma, ZQ,&Yi, BL.(2003).Fabrication of a miniature twin-fuel-cell on silicon wafer.ELECTROCHIMICA ACTA,48(11),1537-1541.
MLA Yu, JR,et al."Fabrication of a miniature twin-fuel-cell on silicon wafer".ELECTROCHIMICA ACTA 48.11(2003):1537-1541.
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