中国科学院大连化学物理研究所机构知识库
Advanced  
DICP OpenIR  > 中国科学院大连化学物理研究所  > 期刊论文
题名: Fabrication of a miniature twin-fuel-cell on silicon wafer
作者: Yu, JR;  Cheng, P;  Ma, ZQ;  Yi, BL
关键词: miniature fuel cell ;  twin-fuel-cell ;  microfabrication ;  silicon wafer ;  interconnect resistance
刊名: ELECTROCHIMICA ACTA
发表日期: 2003-05-15
DOI: 10.1016/S0013-4686(03)00034-3
卷: 48, 期:11, 页:1537-1541
收录类别: SCI
文章类型: Article
部门归属: 301
项目归属: 301
产权排名: 2;1
WOS标题词: Science & Technology ;  Physical Sciences
类目[WOS]: Electrochemistry
研究领域[WOS]: Electrochemistry
英文摘要: The fabrication and performance evaluation of a miniature twin-fuel-cell on silicon wafers are presented in this paper. The miniature twin-fuel-cell was fabricated in series using two membrane-electrode-assemblies sandwiched between two silicon substrates in which electric current, reactant, and product flow. The novel structure of the miniature twin-fuel-cell is that the electricity interconnect from the cathode of one cell to the anode of another cell is made on the same plane. The interconnect was fabricated by sputtering a layer of copper over a layer of gold on the top of the silicon wafer. Silicon dioxide was deposited on the silicon wafer adjacent to the copper layer to prevent short-circuiting between the twin cells. The feed holes and channels in the silicon wafers were prepared by anisotropic silicon etching from the back and front of the wafer with silicon dioxide acting as intrinsic etch-stop layer. Operating on dry H-2/O-2 at 25 degreesC and atmospheric pressure, the measured peak power density was 190.4 mW/cm(2) at 270 mA/cm(2) for the miniature twin-fuel-cell using a Nafion 112 membrane. Based on the polarization curves of the twin-fuel-cell and the two single cells, the interconnect resistance between the twin cells was calculated to be in the range from 0.0113 Omega (at 10 mA/cm(2)) to 0.0150 Omega (at 300 mA/cm(2)), which is relatively low. (C) 2003 Elsevier Science Ltd. All rights reserved.
语种: 英语
原文出处: 查看原文
WOS记录号: WOS:000182330700009
Citation statistics: 
内容类型: 期刊论文
URI标识: http://cas-ir.dicp.ac.cn/handle/321008/82771
Appears in Collections:中国科学院大连化学物理研究所_期刊论文

Files in This Item:
File Name/ File Size Content Type Version Access License
20035M454FIO8P.pdf(648KB)----开放获取--View 联系获取全文

作者单位: 1.Hong Kong Univ Sci & Technol, Dept Mech Engn, Kowloon, Hong Kong, Peoples R China
2.Chinese Acad Sci, Dalian Inst Chem Phys, Fuel Cell R&D Ctr, Dalian 116023, Peoples R China

Recommended Citation:
Yu, JR,Cheng, P,Ma, ZQ,et al. Fabrication of a miniature twin-fuel-cell on silicon wafer[J]. ELECTROCHIMICA ACTA,2003,48(11):1537-1541.
Service
 Recommend this item
 Sava as my favorate item
 Show this item's statistics
 Export Endnote File
Google Scholar
 Similar articles in Google Scholar
 [Yu, JR]'s Articles
 [Cheng, P]'s Articles
 [Ma, ZQ]'s Articles
CSDL cross search
 Similar articles in CSDL Cross Search
 [Yu, JR]‘s Articles
 [Cheng, P]‘s Articles
 [Ma, ZQ]‘s Articles
Related Copyright Policies
Null
Social Bookmarking
  Add to CiteULike  Add to Connotea  Add to Del.icio.us  Add to Digg  Add to Reddit 
文件名: 20035M454FIO8P.pdf
格式: Adobe PDF
此文件暂不支持浏览
所有评论 (0)
暂无评论
 
评注功能仅针对注册用户开放,请您登录
您对该条目有什么异议,请填写以下表单,管理员会尽快联系您。
内 容:
Email:  *
单位:
验证码:   刷新
您在IR的使用过程中有什么好的想法或者建议可以反馈给我们。
标 题:
 *
内 容:
Email:  *
验证码:   刷新

Items in IR are protected by copyright, with all rights reserved, unless otherwise indicated.

 

 

Valid XHTML 1.0!
Powered by CSpace