DICP OpenIR
Experimental study of discharge characteristics and fluorine atom yield on DC discharge of NF3/He
Duo LP(多丽萍); Tang SK(唐书凯); Yu HJ(于海军); Wang J(汪健); Li LC(李留成); Jin YQ(金玉奇); Sang FT(桑凤亭); Yang BL(杨柏龄); Duo LP(多丽萍); Tang SK(唐书凯); Yu HJ(于海军); Wang J(汪健); Li LC(李留成); Jin YQ(金玉奇); Sang FT(桑凤亭); Yang BL(杨柏龄)
Source PublicationProceedings of SPIE
2007
ISSN0277-786X/9780819464309
Volume6346Pages:63463S-1-63463S-6
Department7
Funding Project705
Contribution Rank1;1
Language
URL查看原文
Document Type期刊论文
Identifierhttp://cas-ir.dicp.ac.cn/handle/321008/99745
Collection中国科学院大连化学物理研究所
Corresponding AuthorDuo LP(多丽萍); Duo LP(多丽萍)
Recommended Citation
GB/T 7714
Duo LP,Tang SK,Yu HJ,et al. Experimental study of discharge characteristics and fluorine atom yield on DC discharge of NF3/He[J]. Proceedings of SPIE,2007,6346:63463S-1-63463S-6.
APA 多丽萍.,唐书凯.,于海军.,汪健.,李留成.,...&杨柏龄.(2007).Experimental study of discharge characteristics and fluorine atom yield on DC discharge of NF3/He.Proceedings of SPIE,6346,63463S-1-63463S-6.
MLA 多丽萍,et al."Experimental study of discharge characteristics and fluorine atom yield on DC discharge of NF3/He".Proceedings of SPIE 6346(2007):63463S-1-63463S-6.
Files in This Item:
There are no files associated with this item.
Related Services
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[多丽萍]'s Articles
[唐书凯]'s Articles
[于海军]'s Articles
Baidu academic
Similar articles in Baidu academic
[多丽萍]'s Articles
[唐书凯]'s Articles
[于海军]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[多丽萍]'s Articles
[唐书凯]'s Articles
[于海军]'s Articles
Terms of Use
No data!
Social Bookmark/Share
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.