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Carbonized tantalum catalysts for catalytic chemical vapor deposition of silicon films 期刊论文
THIN SOLID FILMS, 2012, 卷号: 520, 期号: 16, 页码: 5155-5160
Authors:  Cheng, Shimin;  Gao, Huiping;  Ren, Tong;  Ying, Pinliang;  Li, Can;  Li C(李灿)
Adobe PDF(1348Kb)  |  Favorite  |  View/Download:136/16  |  Submit date:2013/10/11
Silicon  Thin Films  Catalytic Chemical Vapor Deposition  Carbonized Tantalum  Catalyst Ageing  X-ray Diffraction  Raman Spectroscopy