DICP OpenIR

Browse/Search Results:  1-1 of 1 Help

Selected(0)Clear Items/Page:    Sort:
Effects of substrate bias and argon flux on the structure of titanium nitride films deposited by filtered cathodic arc plasma 期刊论文
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 2005, 卷号: 202, 期号: 1, 页码: 95-101
Authors:  Zhang, YJ;  Yan, PX;  Wu, ZG;  Zhang, WW;  Zhang, GA;  Liu, WM;  Xue, QJ
Favorite  |  View/Download:27/0  |  Submit date:2015/11/10